Edvard Kälvesten: search on Z-Library

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1

A free-hanging strain-gauge for ultraminiaturized pressure sensors

Patrik Melvås, Edvard Kälvesten, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 384 KB

english, 2002

2

A temperature compensated dual beam pressure sensor

Patrik Melvås, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 520 KB

english, 2002

3

Low-temperature full wafer adhesive bonding

Niklaus, Frank, Enoksson, Peter, Kälvesten, Edvard, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Year:

2001

Language:

english

File:

PDF, 327 KB

english, 2001

4

An integrated pressure—flow sensor for correlation measurements in turbulent gas flows

Edvard Kälvesten, Christian Vieider, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 688 KB

english, 1996

5

A method to maintain wafer alignment precision during adhesive wafer bonding

Frank Niklaus, Peter Enoksson, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 94 KB

english, 2003

6

A small-size silicon microphone for measurements in turbulent gas flows

Edvard Kälvesten, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 604 KB

english, 1994

7

Dynamic actuation of polyimide V-groove joints by electrical heating

Thorbjörn Ebefors, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 729 KB

english, 1998

8

Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows

Edvard Kälvesten, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 455 KB

1995

9

New CO2 filters fabricated by anodic bonding at overpressure in CO2 atmosphere

Thierry Corman, Edvard Kälvesten, Matti Huiku, Kurt Weckström, Pekka Meriläinen, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 737 KB

english, 1998

10

A lift force sensor with integrated hot-chips for wide range flow measurements

Niklas Svedin, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 431 KB

english, 2003

11

A lift-force flow sensor designed for acceleration insensitivity

Niklas Svedin, Edvard Kälvesten, Erik Stemme, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 563 KB

english, 1998

12

Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays

Niklaus, Frank, Kälvesten, Edvard, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Year:

2001

Language:

english

File:

PDF, 283 KB

english, 2001

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